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Effect of Zr and W Doping on Microstructures, Transition Temperature and Solar Transmittance Modulation of Thermochromic W/Zr Co-Doped VO2 Thin Films
Abstract
Thermochromic W/Zr co-doped VO2-based thin films with different
concentrations of Zr were successfully deposited on soda lime glass
substrates by direct current (DC) magnetron sputtering of V(99)W(01)
alloy and Zr targets at a substrate temperature of 425 °C. The films were
characterized by x–ray diffraction (XRD), atomic force microscopy
(AFM), Rutherford backscattering spectroscopy (RBS), two-point probe
and UV/VIS/NIR spectroscopy. The film’s structural properties evolution
was significantly influenced by Zr concentration in the films. The
transition temperature and hysteresis loop widths of the films were found
to decrease with increasing Zr concentration. For the Zr concentrations
of 0.21 at.%, 0.23 at.% and 0.36 at.% the films’ transition temperatures
were 38.1oC, 35.7 oC and 33.7 oC, respectively, whereas the
corresponding hysteresis widths were 12.9 °C, 5.7 °C and 2.6 °C. Films
with 0.36 at.% Zr demonstrated a high value of solar transmittance
modulation at 8%, albeit with some compromise in luminous
transmittance. These results reveal that a controlled amount of Zr in the
W-doped VO2 films can potentially improve the films' thermochromic
properties for smart Windows applications.